NAZCA-3D Major Specifications of the System
Major specifications of the NAZCA-3D system
System Specifications
| Resolution | Horizontal (plane):Min. 0.2μm (≦5mm) *1
Vertical (height):0.1μm (≦5mm) *2 |
|---|---|
| Accuracy | Height measurement repeatability: 0.2μm or less *3 |
| Measurement range | Measurement area (length×width): 0.02×0.02mm - 300×300mm *4
Maximum sample height: Standard 80mm *5 Working distance: 6mm *2 Scanning stage: Standard 20mm/50mm/100mm/200mm/300mm *6 |
| Sensor mechanism | Coarse/fine movement 30mm *1 |
| Measurement | Surface irregularities measurement, line profile measurement (height, width, angle, R, waveform comparison), volume, surface area, plane dimension measurement, image multi-point measurement, surface roughness, periodicity analysis, particle analysis, reference surface height. |
*1 The data is based on the use of the standard 50mm stage. The resolution varies according to the type of the measurement stage used.
*2 The data is based on the use of the ultra high accuracy sensor. The resolution varies according to the accuracy of the measurement sensor head used.
*3 The data is given as σ obtained from the system's 20 repeated measurements of the specified stepped block's 3μm step height using the ultra high accuracy sensor. (Measurement area: 5mm rectangle for each step)
*4 The data is based on the use of the standard 200mm stage.
*5 When you use the system for analysis of any object of special shape outside of the range specified in the specifications, contact us for consultation.
*6 In addition to the standard stages, we offer custom-designed ones, and also safety booths as optional equipment for the system.
System Utility
| Outside dimension *1 | (W×D×H)mm: Approx. 800×600×500mm *1 |
|---|---|
| Weight *1 | Approx. 30kg |
| Maximum power consumption *1 | Approx. 500VA |
| Power requirements *1 | 33pin 100V approx. 10A |
| Ambient temperature *1 | 5-40℃ |
| Number of outlet sockets | 6 or more |
*1 The data is based on the use of the standard 50mm stage. The data varies according to the type of the measurement stage used.
Sensor Unit
| Ultra high accuracy type | [TYPE1] Measurement range: 0.6mm, Measurement range:0.01μm, Reference Distance:6mm, Spot diameter:2μm
[TYPE2] Measurement range:2mm,Resolution:0.1μm,Reference distance :30mm,Spot diameter:7μm |
|---|---|
| High accuracy type | [TYPE1] Measurement range:2mm,Resolution:0.01μm,Reference distance :10mm,Spot diameter:20μm
[TYPE2] Measurement range:10mm,Resolution:0.05μm,Reference distance :30mm,Spot diameter:30μm [TYPE3] Measurement range:30mm,Resolution:0.2μm,Reference distance :80mm,Spot diameter:70μm [TYPE4] Measurement range:80mm,Resolution:0.5μm,Reference distance :150mm,Spot diameter:120μm |
| Measurement system | Ultra high accuracy type: Confocal
High accuracy type: Trigonometry |
*You can select the type of sensor for your NAZCA-3D system from the above list according to its specifications and intended application. Contact us for consultation on the selection of the best sensor for your system.
*The specifications of the sensors specified in the above table are subject to change without prior notice. For the latest updates regarding the specifications, contact us.
*In addition to the standard sensors listed in the above table, we can offer other ones designed to your specifications as a premium option.
Stage Unit
| Movement distance XY | 20mm, 50mm, 100mm, 200mm |
|---|---|
| Positioning repeatability | ±1μm |
| Positioning accuracy | 4μm (for the movement distance of 10mm) |
| Minimum movement resolution | 0.2μm |
| Height (manual) adjustment mechanism | 30mm |
*You can select the type of the stage for your NAZCA-3D system from the above list according to its specifications and intended application. Contact us for consultation on the selection of the best stage for your system.
*The specifications of the stages specified in the above table are subject to change without prior notice. For the latest updates regarding the specifications, contact us.
*In addition to the standard stages listed in the above table, we can offer other ones designed to your specifications as a premium option.
